EEE439 project S24

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School

Arizona State University *

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Course

439

Subject

Electrical Engineering

Date

Apr 3, 2024

Type

pdf

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3

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Semiconductor Facilities and Cleanroom Practices - EEE439/591 Spring '24 – Class Project Create a model for the system below, which is a 10 ft x 10 ft x 1 ft “slice” of a cleanroom, that gives the particle count in any 1 ft 3 unit in the volume (all other slices in the room are numerically identical to this so they can be ignored in this analysis). Assume that air only flows sideways when it is forced to do so by the equipment (dark gray) but ignore the effect of people on airflow. For recirculation purposes, all the air in Zone 1 (light gray) is recirculated whereas the portion of air recirculated in Zone 2 (light blue) depends on the flow rate into this zone and the exhaust flow rate . Test your model with the following “test case” input, which includes two people in the room: Final filter flow rate = 100 cfm/column Exhaust flow rate = 125 cfm Make-up filter efficiency = 99.9% Recirc filter efficiency = 99.9% Final filter efficiency = 99.97% External particle density = 7.5 x 10 5 /ft 3 Generation rate (per min) of 0.5 µm particles in each ft 3 : 1 2
If you have designed the model properly, for these inputs you should obtain the particle counts (number of particles in each 1 ft 3 volume shown to one decimal place for clarity) shown below. Note that the number of particles penetrating the final filters in each column for these input parameters is around 2.8/min - your model should also give this value (a more exact value is 2.812844707, which is much more precision than you would ever need but it will help you to determine if your model is working!). Since none of the counts in this volume exceeds 100 particles/ft 3 of 0.5 µm diameter, this could be a Class 100 environment under Fed. Std. 209E. Now consider the following scenarios: Case 1. (For all sections of the class.) Better cleanroom garments, materials, and operating practices lead to smaller generation rates inside the room, to give the particle generation map below. Note that the flow rates and final filter efficiency have also been altered. Show the particle counts in the volume. What class under Fed. Std. 209E would this room attain? Final filter flow rate = 120 cfm/column Exhaust flow rate = 150 cfm Make-up filter efficiency = 99.9% Recirc filter efficiency = 99.9% Final filter efficiency = 99.997% External particle density = 7.5 x 10 5 /ft 3 Generation rate (per min) of 0.5 µm particles in each ft 3 :
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